Microelectromechanical system transducers (MEMS) are fabricated using solid-state micromachining techniques that are typically employed by the semiconductor industry in the production of integrated circuits (ICs).
Related: The application of Microprocessors in Medical Instrumentation
A pressure sensor based on MEMS technology is based on the deflection of a micromachined silicon diaphragm mounted on a piezoelectric transducer that changes its output voltage with corresponding variations in the applied pressure.
Typical application of MEMS in medical field is the development as a disposable transducer for use in invasive blood pressure monitoring. The MEMS transducer measures blood pressure through a silicon-based dielectric gel applied between the sensor element and the saline solution filling the intravascular catheter. The work of the gel is to protect the sensitive electrical circuitry by providing electrical isolation between the MEMS sensor and the saline solution.
MEMS-based medical sensors are employed for instance, in intrauterine pressure measurement to monitor contractions during delivery, automatic non-invasive blood pressure cuffs, respiratory monitors, infusing pumps, and kidney dialysis machines.
Related: Types of Transducers Used in Medical Measurements
MEMS transducers are also used as accelerometers in implantable pacemakers to monitor body motion to determine patient exertion level and appropriately adjust the pacing rate to match the changes in metabolic demand.
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